Both samples were fabricated in 1.5 µm tungsten and include sub 100 nm features. The source files were supplied by the customers, and after some necessary pre-processing (exposure proximity corrections) they were used to expose the patterns. In the case of the IXO sample, the source file was just the logo of the institute, and it was included on a chart with other objects, Low, medium, and High resolution Siemens Stars, concentric circles etc. The “Harwell” source file included all necessary objects, and was exposed as supplied without any additional objects. Click on the source files below too see images of the actual Calibration Charts
